High-Frequency Vibration Analysis of Piezoelectric Array Sensor under Lateral-Field-Excitation Based on Crystals with 3 m Point Group

Abstract

Based on Mindlin’s first-order plate theory, the high-frequency vibrations of piezoelectric bulk acoustic wave array sensors under lateral-field-excitation based on crystals with 3 m point group are analyzed, and the spectral-frequency relationships are solved, based on which, the optimal length–thickness ratio of the piezoelectric crystal plate is determined. Then, the dynamic capacitance diagram is obtained by a forced vibration analysis of the piezoelectric crystal plate. The resonant mode conforming to good energy trapping is further obtained. The frequency interferences between different resonator units are calculated, and the influences of the spacing between two resonant units on the frequency interference with different electrode widths and spacings are analyzed. Finally, the safe spacings between resonator units are obtained. As the electrode spacing value of the left unit increases, the safe spacing d0 between the two resonator units decreases, and the frequency interference curve tends to zero faster. When the electrode spacings of two resonator units are equal, the safe distance is largest, and the frequency interference curve tends to zero slowest. The theoretical results are verified further by finite element method. The analysis model of high frequency vibrations of strongly coupled piezoelectric bulk acoustic array device based on LiTaO3 crystals with 3 m point group proposed in this paper can provide reliable theoretical guidance for size optimization designs of strongly coupled piezoelectric array sensors under lateral-field-excitation.

Keywords

• bulk acoustic wave sensor
• array devices
• 3 m point group crystals
• lateral-field-excitation
• energy trapping