Journal of Synchrotron Radiation (Sep 2022)

A new Kirkpatrick–Baez-based scanning microscope for the Submicron Resolution X-ray Spectroscopy (SRX) beamline at NSLS-II

  • E. Nazaretski,
  • D. S. Coburn,
  • W. Xu,
  • J. Ma,
  • H. Xu,
  • R. Smith,
  • X. Huang,
  • Y. Yang,
  • L. Huang,
  • M. Idir,
  • A. Kiss,
  • Y. S. Chu

DOI
https://doi.org/10.1107/S1600577522007056
Journal volume & issue
Vol. 29, no. 5
pp. 1284 – 1291

Abstract

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The development, construction, and first commissioning results of a new scanning microscope installed at the 5-ID Submicron Resolution X-ray Spectroscopy (SRX) beamline at NSLS-II are reported. The developed system utilizes Kirkpatrick–Baez mirrors for X-ray focusing. The instrument is designed to enable spectromicroscopy measurements in 2D and 3D with sub-200 nm spatial resolution. The present paper focuses on the design aspects, optical considerations, and specifics of the sample scanning stage, summarizing some of the initial commissioning results.

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