Nature Communications (Apr 2022)

Creating three-dimensional magnetic functional microdevices via molding-integrated direct laser writing

  • Zemin Liu,
  • Meng Li,
  • Xiaoguang Dong,
  • Ziyu Ren,
  • Wenqi Hu,
  • Metin Sitti

DOI
https://doi.org/10.1038/s41467-022-29645-2
Journal volume & issue
Vol. 13, no. 1
pp. 1 – 11

Abstract

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Magnetic, wireless miniature devices are promising for healthcare, information technology, and many other field but lack advanced fabrication methods for micrometer length scales. Here authors present a molding-integrated direct laser writing fabrication protocol to fabricate 3D micron-scale devices with programmable magnetization and multi-material integration.