BIO Web of Conferences (Jan 2024)

Strain analysis comparison in complementary and nanosheet field-effect transistor devices: Nanobeam vs Bessel electron diffraction

  • Favia Paola,
  • Veloso Anabela,
  • Eneman Geert,
  • Mehta Ankit Nalin,
  • Zhou Xiuju,
  • Richard Olivier,
  • Geypen Jef,
  • Grieten Eva

DOI
https://doi.org/10.1051/bioconf/202412924025
Journal volume & issue
Vol. 129
p. 24025

Abstract

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