Review of surface acoustic wave-based hydrogen sensor

Baile Cui; Zixuan Ren; Wen Wang; Lina Cheng; Xu Gao; Lintaihui Huang; Anyu Hu; Fanbing Hu; Jing Jin

Sensors and Actuators Reports (Jun 2024)

Review of surface acoustic wave-based hydrogen sensor

Baile Cui,
Zixuan Ren,
Wen Wang,
Lina Cheng,
Xu Gao,
Lintaihui Huang,
Anyu Hu,
Fanbing Hu,
Jing Jin

Affiliations

Baile Cui: State Key Laboratory of Acoustics, Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, PR China; University of Chinese Academy of Sciences, Beijing 100190, PR China
Zixuan Ren: State Key Laboratory of Acoustics, Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, PR China; University of Chinese Academy of Sciences, Beijing 100190, PR China
Wen Wang: State Key Laboratory of Acoustics, Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, PR China; University of Chinese Academy of Sciences, Beijing 100190, PR China; Corresponding author.
Lina Cheng: State Key Laboratory of Acoustics, Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, PR China; University of Chinese Academy of Sciences, Beijing 100190, PR China
Xu Gao: State Key Laboratory of Acoustics, Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, PR China; University of Chinese Academy of Sciences, Beijing 100190, PR China
Lintaihui Huang: University of Chinese Academy of Sciences, Beijing 100190, PR China
Anyu Hu: State Key Laboratory of Acoustics, Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, PR China; University of Chinese Academy of Sciences, Beijing 100190, PR China
Fanbing Hu: State Key Laboratory of Acoustics, Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, PR China; University of Chinese Academy of Sciences, Beijing 100190, PR China
Jing Jin: State Key Laboratory of Acoustics, Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, PR China

Journal volume & issue: Vol. 7
p. 100197

Abstract

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Hydrogen (H2) sensors with excellent performance play an important role in the safety application of H2 energy. Among current H2 detection technologies, surface acoustic wave (SAW) based H2 sensors attract more attention due to their features of high sensitivity, fast response, mico-nano scale and excellent stability, which was composed of a SAW sensing chip and sensing materials depositing along the acoustic wave propagation path, and utilizing the coupling mechanism of force-acoustic-electric multiple physical fields. Here we review the SAW H2 sensor, focusing on the H2 sensing materials, SAW sensing mechanisms, sensing devices, sensing circuits, and development status. And prospects were made for its development trends and challenges.

Published in Sensors and Actuators Reports

ISSN: 2666-0539 (Online)
Publisher: Elsevier
Country of publisher: Netherlands
LCC subjects: Science: Mathematics: Instruments and machines
Website: https://www.journals.elsevier.com/sensors-and-actuators-reports/

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Abstract

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