A method to improve the performance of ultraviolet light-emitting diodes (UV-LEDs) with stair-like Si-doping GaN layer is investigated. The high-resolution X-ray diffraction shows that the UV-LED with stair-like Si-doping GaN layer possesses better quality and a lower dislocation density. In addition, the experimental results demonstrate that light output power and wall plug efficiency of UV-LED with stair-like Si-doping GaN are significantly improved. Through the analysis of the experimental and simulation results, we can infer that there are two reasons for the improvement of photoelectric characteristics: reduction of dislocation density and alleviating of current crowding of UV-LEDs by introduced stair-like Si-doping GaN.
