Study of interface reactions between Ti/Al/Ni/Au metallization and AlGaN/GaN heterostructures

• Macherzyński Wojciech,
• Paszkiewicz Bogdan

Affiliations

Macherzyński Wojciech

Faculty of Microsystem Electronics and Photonics, Wroclaw University of Technology, 11/17 Janiszewskiego Street, 50-372, Wrocław, Poland

Paszkiewicz Bogdan

Faculty of Microsystem Electronics and Photonics, Wroclaw University of Technology, 11/17 Janiszewskiego Street, 50-372, Wrocław, Poland