Vibration Identification of Folded-MEMS Comb Drive Resonators

Micromachines. 2018;9(8):381 DOI 10.3390/mi9080381

 

Journal Homepage

Journal Title: Micromachines

ISSN: 2072-666X (Online)

Publisher: MDPI AG

LCC Subject Category: Technology: Mechanical engineering and machinery

Country of publisher: Switzerland

Language of fulltext: English

Full-text formats available: PDF, HTML, ePUB, XML

 

AUTHORS

Jianxin Han (Tianjin Key Laboratory of High Speed Cutting and Precision Machining, School of Mechanical Engineering, Tianjin University of Technology and Education, Tianjin 300222, China)
Lei Li (School of Transportation and Vehicle Engineering, Shandong University of Technology, Zibo 255049, China)
Gang Jin (Tianjin Key Laboratory of High Speed Cutting and Precision Machining, School of Mechanical Engineering, Tianjin University of Technology and Education, Tianjin 300222, China)
Jingjing Feng (Tianjin Key Laboratory for Advanced Mechatronic System Design and Intelligent Control, School of Mechanical Engineering, Tianjin University of Technology, Tianjin 300384, China)
Baizhou Li (Tianjin Key Laboratory of High Speed Cutting and Precision Machining, School of Mechanical Engineering, Tianjin University of Technology and Education, Tianjin 300222, China)
Haili Jia (Tianjin Key Laboratory of High Speed Cutting and Precision Machining, School of Mechanical Engineering, Tianjin University of Technology and Education, Tianjin 300222, China)
Wenkui Ma (Department of Mechanical Engineering, Henan Mechanical and Electrical Vocational College, Zhengzhou 451191, China)

EDITORIAL INFORMATION

Blind peer review

Editorial Board

Instructions for authors

Time From Submission to Publication: 11 weeks

 

Abstract | Full Text

Natural frequency and frequency response are two important indicators for the performances of resonant microelectromechanical systems (MEMS) devices. This paper analytically and numerically investigates the vibration identification of the primary resonance of one type of folded-MEMS comb drive resonator. The governing equation of motion, considering structure and electrostatic nonlinearities, is firstly introduced. To overcome the shortcoming of frequency assumption in the literature, an improved theoretical solution procedure combined with the method of multiple scales and the homotopy concept is applied for primary resonance solutions in which frequency shift due to DC voltage is thoroughly considered. Through theoretical predictions and numerical results via the finite difference method and fourth-order Runge-Kutta simulation, we find that the primary frequency response actually includes low and high-energy branches when AC excitation is small enough. As AC excitation increases to a certain value, both branches intersect with each other. Then, based on the variation properties of frequency response branches, hardening and softening bending, and the ideal estimation of dynamic pull-in instability, a zoning diagram depicting extreme vibration amplitude versus DC voltage is then obtained that separates the dynamic response into five regions. Excellent agreements between the theoretical predictions and simulation results illustrate the effectiveness of the analyses.