Characterization of microwave source plasma in the presence of a magnetic field caused by a permanent magnet

Abstract

In this work, an argon microwave plasma with a frequency of 2.45 GHz at low pressure is experimentally demonstrated. Then, the characteristics of the formed plasma (temperature and density of electrons) in the presence and without the presence of a magnetic field are calculated and compared by optical emission spectroscopy. Permanent magnets are used to confine the plasma and supply the magnetic field in the electron cyclotron resonance mechanism. With the help of simulation, the proper arrangement of the magnets to produce the desired magnetic field is obtained. Then, using the relevant physical models, the temperature and density of the electrons are calculated. The results show that the magnetic field has a significant effect on the plasma characteristics and causes about 125% increase in temperature and 200% increase in electron density. It is also shown that, as expected, as the pressure decreases, the temperature of the electrons increases and their density decreases. This confirms the accuracy of the experiment and the obtained results

Keywords

• microwave plasma
• plasma characterization
• electron cyclotron resonance mechanism