Precision Measurement of Cylinder Surface Profile on an Ultra-Precision Machine Tool

• Lee J.,
• Noh Y.,
• Arai Y.,
• Gao W.,
• Park C.

Affiliations

Lee J.

Nano-Metrology and Control Lab, Department of Nanomechanics, Tohoku University, Aramaki Aza Aoba 6-6-01, Sendai, 980-8579, Japan

Noh Y.

Nano-Metrology and Control Lab, Department of Nanomechanics, Tohoku University, Aramaki Aza Aoba 6-6-01, Sendai, 980-8579, Japan

Arai Y.

Nano-Metrology and Control Lab, Department of Nanomechanics, Tohoku University, Aramaki Aza Aoba 6-6-01, Sendai, 980-8579, Japan

Gao W.

Nano-Metrology and Control Lab, Department of Nanomechanics, Tohoku University, Aramaki Aza Aoba 6-6-01, Sendai, 980-8579, Japan

Park C.

Korea Institute of Machinery and Materials, Sinseongno Yuseong-Gu, Deajeon, South Korea