Sensitivity Analysis of Piezoelectric Microcantilever Excitability as Resonator

Abstract

Piezoelectric Microcantilevers (MCs) are efficient tools in switches of MEMS, AFMs and nano-resonators. Creating maximum vibrating motion with minimum excitation voltage is important in reducing power consumption and noise in this type of MCs. Therefore, investigating the factors affecting the excitability of MCs, as well as the degree of the effect of each of these factors, have an important role in the design and optimal selection of this type of resonators. Therefore, the aim of this paper was to investigate the excitability of this type of MCs. Modeling is conducted according to Hamilton principle and Euler-Bernoulli theory. Equation of motion was solved using Galerkin method with respect to geometrical discontinuities. Finally, eFAST sensitivity analysis was performed on excitability of MCs using statistical methods. Sensitivity analysis results show that the length and thickness of the piezoelectric layer are the most influential parameters on the excitability of MCs. At L1/L=0.74, the excitability reaches its maximum value.

Keywords

• excitation ability
• piezoelectric microcantilever
• sensitivity analysis