Converting a Microwave Oven into a Plasma Reactor: A Review

Abstract

This paper reviews the use of domestic microwave ovens as plasma reactors for applications ranging from surface cleaning to pyrolysis and chemical synthesis. This review traces the developments from initial reports in the 1980s to today’s converted ovens that are used in proof-of-principle manufacture of carbon nanostructures and batch cleaning of ion implant ceramics. Information sources include the US and Korean patent office, peer-reviewed papers, and web references. It is shown that the microwave oven plasma can induce rapid heterogeneous reaction (solid to gas and liquid to gas/solid) plus the much slower plasma-induced solid state reaction (metal oxide to metal nitride). A particular focus of this review is the passive and active nature of wire aerial electrodes, igniters, and thermal/chemical plasma catalyst in the generation of atmospheric plasma. In addition to the development of the microwave oven plasma, a further aspect evaluated is the development of methodologies for calibrating the plasma reactors with respect to microwave leakage, calorimetry, surface temperature, DUV-UV content, and plasma ion densities.