Molecular Layer Deposition Using Ring-Opening Reactions: Molecular Modeling of the Film Growth and the Effects of Hydrogen Peroxide

• Laura Keskiväli,
• Matti Putkonen,
• Eini Puhakka,
• Eija Kenttä,
• Jeroen Kint,
• Ranjith K. Ramachandran,
• Christophe Detavernier,
• Pekka Simell

Affiliations

Laura Keskiväli

VTT Technical Research Centre of Finland, Espoo, Finland

Matti Putkonen

VTT Technical Research Centre of Finland, Espoo, Finland

Eini Puhakka

Department of Chemistry, University of Helsinki, Helsinki, Finland

Eija Kenttä

VTT Technical Research Centre of Finland, Espoo, Finland

Jeroen Kint

Department of Solid State Sciences, Ghent University, Gent, Belgium

Ranjith K. Ramachandran

Department of Solid State Sciences, Ghent University, Gent, Belgium

Christophe Detavernier

Department of Solid State Sciences, Ghent University, Gent, Belgium

Pekka Simell

VTT Technical Research Centre of Finland, Espoo, Finland