Electric Field-Assisted Agglomeration of Trace Nanoparticle Impurities for Ultrahigh Purity Chemicals

• Dongryul Lee,
• Donggyu Lee,
• Sungjune Lee,
• Hee Jeong Park,
• Kuk Nam Han,
• Sam-Jong Choi,
• Yun Ho Kim,
• Jihyun Kim

Affiliations

Dongryul Lee

Department of Chemical and Biological Engineering, Korea University, Seoul, South Korea

Donggyu Lee

Department of Chemical and Biological Engineering, Seoul National University, Seoul, South Korea

Sungjune Lee

Material Technology Team, Samsung Electronics, Hwaseong-si, Gyeonggi-do, South Korea

Hee Jeong Park

Material Technology Team, Samsung Electronics, Hwaseong-si, Gyeonggi-do, South Korea

Kuk Nam Han

Material Technology Team, Samsung Electronics, Hwaseong-si, Gyeonggi-do, South Korea

Sam-Jong Choi

Material Technology Team, Samsung Electronics, Hwaseong-si, Gyeonggi-do, South Korea

Yun Ho Kim

Material Technology Team, Samsung Electronics, Hwaseong-si, Gyeonggi-do, South Korea

Jihyun Kim

Department of Chemical and Biological Engineering, Seoul National University, Seoul, South Korea