Role of Interfacial Oxide in the Preferred Orientation of Ga2O3 on Si for Deep Ultraviolet Photodetectors

• Chao-Chun Yen,
• Tsun-Min Huang,
• Po-Wei Chen,
• Kai-Ping Chang,
• Wan-Yu Wu,
• Dong-Sing Wuu

Affiliations

Chao-Chun Yen

Department of Materials Science and Engineering, National Chung Hsing University, Taichung, Taiwan

Tsun-Min Huang

Department of Materials Science and Engineering, National Chung Hsing University, Taichung, Taiwan

Po-Wei Chen

Department of Materials Science and Engineering, National Chung Hsing University, Taichung, Taiwan

Kai-Ping Chang

Department of Materials Science and Engineering, National Chung Hsing University, Taichung, Taiwan

Wan-Yu Wu

Department of Materials Science and Engineering, Da-Yeh University, Changhua, Taiwan

Dong-Sing Wuu

Department of Materials Science and Engineering, National Chung Hsing University, Taichung, Taiwan