Double-Deck Metal Solenoids 3D Integrated in Silicon Wafer for Kinetic Energy Harvester
Nianying Wang,
Ruofeng Han,
Changnan Chen,
Jiebin Gu,
Xinxin Li
Affiliations
Nianying Wang
State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
Ruofeng Han
State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
Changnan Chen
State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
Jiebin Gu
State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
Xinxin Li
State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
A silicon-chip based double-deck three-dimensional (3D) solenoidal electromagnetic (EM) kinetic energy harvester is developed to convert low-frequency (μW. The EM energy harvester shows great improvement in power density, which is 786 μW/cm3 and the normalized power density is 98.3 μW/cm3/g. The EM energy harvester is verified by experiment to be able to generate electricity through various human body movements of walking, running and jumping. The wafer-level fabricated chip-style solenoidal EM harvesters are advantageous in uniform performance, small size and volume applications.
