Suspended silicon waveguide platform with subwavelength grating metamaterial cladding for long-wave infrared sensing applications

Abstract

Long-wave infrared (LWIR, 6–14 µm) processes enormous potential for chem/biosensing as it covers abundant molecular absorption fingerprints. Waveguides provide an attractive chip-scale miniaturization solution for optical sensors. However, the exploration of waveguide sensors in this wavelength range is limited. Here, an LWIR photonic platform for fast and sensitive on-chip gas sensing is developed using suspended silicon (Si) waveguide supported by subwavelength grating (SWG) metamaterial claddings. This platform provides a viable approach to fully exploit the transparency window of Si. The SWG structure provides a promising solution to engineer the mode profile for strong light–analyte interaction. Propagation loss and bending loss are studied in the broad wavelength range of 6.4–6.8 µm. Functional devices including grating couplers, Y-junctions, and directional couplers are also demonstrated with high performance. Sensing demonstration based on our platform is presented using toluene vapor detection as an example. The corresponding limit of detection reaches 75 ppm. The response and recovery time to 75 ppm toluene are about 0.8 and 3.4 s, respectively. This good performance makes our platform a promising candidate for on-site medical and environmental applications.

Keywords

• chemical sensor
• mid-infrared
• photonic platform
• subwavelength grating
• suspended si waveguide