Hybrid Integration of Magnetoresistive Sensors with MEMS as a Strategy to Detect Ultra-Low Magnetic Fields

Micromachines. 2016;7(5):88 DOI 10.3390/mi7050088

 

Journal Homepage

Journal Title: Micromachines

ISSN: 2072-666X (Online)

Publisher: MDPI AG

LCC Subject Category: Technology: Mechanical engineering and machinery

Country of publisher: Switzerland

Language of fulltext: English

Full-text formats available: PDF, HTML, ePUB, XML

 

AUTHORS

João Valadeiro (Instituto de Engenharia de Sistemas de Computadores-Microsystems and Nanotechnology (INESC-MN), Rua Alves Redol, No. 9, Lisboa 1000-029, Portugal)
Susana Cardoso (Instituto de Engenharia de Sistemas de Computadores-Microsystems and Nanotechnology (INESC-MN), Rua Alves Redol, No. 9, Lisboa 1000-029, Portugal)
Rita Macedo (Picosense, Inc., 1900 Addison St Ste 200, Berkeley, CA 94704, USA)
Andre Guedes (Picosense, Inc., 1900 Addison St Ste 200, Berkeley, CA 94704, USA)
João Gaspar (International Iberian Nanotechnology Laboratory (INL), Av. Mestre Jose Veiga, Braga 4715-330, Portugal)
Paulo P. Freitas (Instituto de Engenharia de Sistemas de Computadores-Microsystems and Nanotechnology (INESC-MN), Rua Alves Redol, No. 9, Lisboa 1000-029, Portugal)

EDITORIAL INFORMATION

Blind peer review

Editorial Board

Instructions for authors

Time From Submission to Publication: 11 weeks

 

Abstract | Full Text

In this paper, we describe how magnetoresistive sensors can be integrated with microelectromechanical systems (MEMS) devices enabling the mechanical modulation of DC or low frequency external magnetic fields to high frequencies using MEMS structures incorporating magnetic flux guides. In such a hybrid architecture, lower detectivities are expected when compared with those obtained for individual sensors. This particularity results from the change of sensor’s operating point to frequencies above the 1/f noise knee.