Micromachines (May 2016)

Hybrid Integration of Magnetoresistive Sensors with MEMS as a Strategy to Detect Ultra-Low Magnetic Fields

  • João Valadeiro,
  • Susana Cardoso,
  • Rita Macedo,
  • Andre Guedes,
  • João Gaspar,
  • Paulo P. Freitas

DOI
https://doi.org/10.3390/mi7050088
Journal volume & issue
Vol. 7, no. 5
p. 88

Abstract

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In this paper, we describe how magnetoresistive sensors can be integrated with microelectromechanical systems (MEMS) devices enabling the mechanical modulation of DC or low frequency external magnetic fields to high frequencies using MEMS structures incorporating magnetic flux guides. In such a hybrid architecture, lower detectivities are expected when compared with those obtained for individual sensors. This particularity results from the change of sensor’s operating point to frequencies above the 1/f noise knee.

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