Multi-axis integrated Hall magnetic sensors

Abstract

Conventional Hall magnetic sensors respond only to the magnetic field component perpendicular to the surface of the sensor die. Multi-axis sensing capability can be provided in the following two ways: (a) by integrating magnetic flux concentrators on the die, and (b) by using vertical Hall devices. Here we review the most important two-and three-axis integrated Hall magnetic sensors based on these concepts. Their applications include mapping of magnetic fields and sensing angular position.

Keywords

• integrated Hall sensors
• multi-axes magnetic sensors
• angular position sensing
• teslameter