Commercial rolled AISI 321 stainless steel samples were irradiated with Al+ ions with an energy of 80 keV and fluence of 1017 ion/cm2. The effect of Al implantation on the chemical and phase composition of the steel surface layer was studied by X-ray electron spectroscopy and grazing beam mode of X-ray diffraction analysis. A thin surface layer down to a depth of 30 nm after Al+ ions implantation consists mainly of metal oxides. In the near-surface layers of 5 nm in depth, a noticeable depletion in chromium and nickel was observed. A surface layer (up to 0.5 µm) of non-irradiated steel, in addition to the f.c.c. austenite γ-phase, consists of up to 20 vol% of the b.c.c. α′-phase, which formed at rolling as a result of mechanical deformation. Al implantation results in the significant increase in the α′-phase amount in the surface layer at a depth up to 2 µm. It is indicated that the observed γ → α′ transformation at ion irradiation proceeds predominantly as a result of the effect of post-cascade shock waves, but not as a result of the surface layer chemical composition changes.
