Nature Communications (Aug 2020)

Boundary-directed epitaxy of block copolymers

  • Robert M. Jacobberger,
  • Vikram Thapar,
  • Guang-Peng Wu,
  • Tzu-Hsuan Chang,
  • Vivek Saraswat,
  • Austin J. Way,
  • Katherine R. Jinkins,
  • Zhenqiang Ma,
  • Paul F. Nealey,
  • Su-Mi Hur,
  • Shisheng Xiong,
  • Michael S. Arnold

DOI
https://doi.org/10.1038/s41467-020-17938-3
Journal volume & issue
Vol. 11, no. 1
pp. 1 – 10

Abstract

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Directing the position, orientation, and long-range lateral order of block copolymer domains to produce technologically-useful, sublithographic patterns is a challenge. Here, the authors present a promising approach to overcome the challenge by directing assembly using spatial boundaries between planar, low-resolution regions on a surface with different composition.