Active and Passive Electronic Components (Jan 1977)

UHV – Deposited Amorphous Tantalum and Tantalum–Nickel Films

  • Günther Menzel,
  • Alfred Schäfer

DOI
https://doi.org/10.1155/APEC.4.29
Journal volume & issue
Vol. 4, no. 1
pp. 29 – 35

Abstract

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