Micro triboelectric ultrasonic device for acoustic energy transfer and signal communication

Chen Chen; Zhen Wen; Jihong Shi; Xiaohua Jian; Peiyang Li; John T. W. Yeow; Xuhui Sun

doi:10.1038/s41467-020-17842-w

Nature Communications (Aug 2020)

Micro triboelectric ultrasonic device for acoustic energy transfer and signal communication

Chen Chen,
Zhen Wen,
Jihong Shi,
Xiaohua Jian,
Peiyang Li,
John T. W. Yeow,
Xuhui Sun

Affiliations

Chen Chen: Institute of Functional Nano and Soft Materials (FUNSOM), Jiangsu Key Laboratory for Carbon-Based Functional Materials and Devices, and Joint International Research Laboratory of Carbon-Based Functional Materials and Devices, Soochow University
Zhen Wen: Institute of Functional Nano and Soft Materials (FUNSOM), Jiangsu Key Laboratory for Carbon-Based Functional Materials and Devices, and Joint International Research Laboratory of Carbon-Based Functional Materials and Devices, Soochow University
Jihong Shi: Institute of Functional Nano and Soft Materials (FUNSOM), Jiangsu Key Laboratory for Carbon-Based Functional Materials and Devices, and Joint International Research Laboratory of Carbon-Based Functional Materials and Devices, Soochow University
Xiaohua Jian: Suzhou Institute of Biomedical Engineering and Technology, Chinese Academy of Sciences
Peiyang Li: Suzhou Institute of Biomedical Engineering and Technology, Chinese Academy of Sciences
John T. W. Yeow: Advanced Micro-/Nano-Devices Lab, Department of Systems Design Engineering, Waterloo Institute for Nanotechnology, University of Waterloo, 200 University Avenue West
Xuhui Sun: Institute of Functional Nano and Soft Materials (FUNSOM), Jiangsu Key Laboratory for Carbon-Based Functional Materials and Devices, and Joint International Research Laboratory of Carbon-Based Functional Materials and Devices, Soochow University

DOI: https://doi.org/10.1038/s41467-020-17842-w
Journal volume & issue: Vol. 11, no. 1
pp. 1 – 9

Abstract

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Miniaturizing efficient triboelectric nanogenerators remains a challenge. Here, the authors propose a MEMS-based micro triboelectric device for acoustic energy transfer and signal communication which is capable of generating the voltage signal of 16.8 mV and 12.7 mV through oil and sound-attenuation medium respectively with 63kPa at 1 MHz ultrasound input.

Published in Nature Communications

ISSN: 2041-1723 (Online)
Publisher: Nature Portfolio
Country of publisher: United Kingdom
LCC subjects: Science
Website: https://www.nature.com/ncomms/

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