High-efficiency nonlinear frequency conversion enabled by optimizing the ferroelectric domain structure in x-cut LNOI ridge waveguide
Su Yawen,
Zhang Xinyu,
Chen Haiwei,
Li Shifeng,
Ma Jianan,
Li Wei,
Niu Yunfei,
Qin Qi,
Yang Shaoguang,
Deng Yu,
Zhang Yong,
Hu Xiaopeng,
Zhu Shining
Affiliations
Su Yawen
National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences, School of Physics, and Collaborative Innovation Center of Advanced Microstructures, 12581Nanjing University, Nanjing210093, China
Zhang Xinyu
National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences, School of Physics, and Collaborative Innovation Center of Advanced Microstructures, 12581Nanjing University, Nanjing210093, China
Chen Haiwei
National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences, School of Physics, and Collaborative Innovation Center of Advanced Microstructures, 12581Nanjing University, Nanjing210093, China
Li Shifeng
National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences, School of Physics, and Collaborative Innovation Center of Advanced Microstructures, 12581Nanjing University, Nanjing210093, China
Ma Jianan
National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences, School of Physics, and Collaborative Innovation Center of Advanced Microstructures, 12581Nanjing University, Nanjing210093, China
Li Wei
College of Integrated Circuit Science and Engineering, National and Local Joint Engineering Laboratory of RF Integration and Micro-Assembly Technology, 12581Nanjing University of Posts and Telecommunications, Nanjing210023, China
Niu Yunfei
559075Zhejiang Lab, Hangzhou311121, China
Qin Qi
State Key Laboratory of Radio Frequency Heterogeneous Integration, Key Laboratory of Intelligent Optical Measurement and Detection of Shenzhen, 47890Shenzhen University, Shenzhen518060, China
Yang Shaoguang
National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences, School of Physics, and Collaborative Innovation Center of Advanced Microstructures, 12581Nanjing University, Nanjing210093, China
Deng Yu
National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences, School of Physics, and Collaborative Innovation Center of Advanced Microstructures, 12581Nanjing University, Nanjing210093, China
Zhang Yong
National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences, School of Physics, and Collaborative Innovation Center of Advanced Microstructures, 12581Nanjing University, Nanjing210093, China
Hu Xiaopeng
National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences, School of Physics, and Collaborative Innovation Center of Advanced Microstructures, 12581Nanjing University, Nanjing210093, China
Zhu Shining
National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences, School of Physics, and Collaborative Innovation Center of Advanced Microstructures, 12581Nanjing University, Nanjing210093, China
Photonic devices based on ferroelectric domain engineering in thin film lithium niobate are key components for both classical and quantum information processing. Periodic poling of ridge waveguide can avoid the selective etching effect of lithium niobate, however, the fabrication of high-quality ferroelectric domain is still a challenge. In this work, we optimized the applied electric field distribution, and rectangular inverted domain structure was obtained in the ridge waveguide which is beneficial for efficient nonlinear frequency conversions. Second harmonic confocal microscope, piezoresponse force microscopy, and chemical selective etching were used to characterize the inverted domain in the ridge waveguide. In addition, the performance of nonlinear frequency conversion of the periodically poled nano-waveguide was investigated through second harmonic generation, and the normalized conversion efficiency was measured to be 1,720 % W−1 cm−2, which is close to 60 % that of the theoretical value. The fabrication technique described in this work will pave the way for the development of high-efficiency, low-loss lithium niobate nonlinear photonic devices.
