Sensors & Transducers (Dec 2009)
Design and Simulation of MOEMS Thermal Sensor Based on a Bimetallic Mechanism
Abstract
In this paper, a MOEMS Thermal Sensor Based on a Bimetallic Cantilever Beam was designed. The governing thermo opto-mechanical equations were derived and solved analytically. The temperature rising was expressed with respect to changes of reflected light angle. The results of beam deflection were compared well with the existing results.
