Circular High-Q Resonating Isotropic Strain Sensors with Large Shift of Resonance Frequency under Stress

Abstract

We present circular architecture bioimplant strain sensors that facilitate a strong resonance frequency shift with mechanical deformation. The clinical application area of these sensors is for in vivo assessment of bone fractures. Using a rectangular geometry, we obtain a resonance shift of 330 MHz for a single device and 170 MHz for its triplet configuration (with three side-by-side resonators on chip) under an applied load of 3,920 N. Using the same device parameters with a circular isotropic architecture, we achieve a resonance frequency shift of 500 MHz for the single device and 260 MHz for its triplet configuration, demonstrating substantially increased sensitivity.

Keywords

• RFIC
• Q-factor
• resonators
• circular architecture
• bioMEMS sensors
• frequency shift
• sensitivity