Multi-scale alignment to buried atom-scale devices using Kelvin probe force microscopy

• Namboodiri Pradeep,
• Wyrick Jonathan,
• Stan Gheorghe,
• Wang Xiqiao,
• Fei Fan,
• Kashid Ranjit Vilas,
• Schmucker Scott W.,
• Kasica Richard,
• Barnes Bryan M.,
• Stewart Jr Michael D.,
• Silver Richard M.

Affiliations

Namboodiri Pradeep

Physical Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, MD 20899, United States of America

Wyrick Jonathan

Physical Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, MD 20899, United States of America

Stan Gheorghe

Material Measurement Laboratory, National Institute of Standards and Technology,, Gaithersburg, MD 20899, United States of America

Wang Xiqiao

Physical Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, MD 20899, United States of America

Fei Fan

Physical Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, MD 20899, United States of America

Kashid Ranjit Vilas

Physical Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, MD 20899, United States of America

Schmucker Scott W.

Physical Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, MD 20899, United States of America

Kasica Richard

Physical Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, MD 20899, United States of America

Barnes Bryan M.

Physical Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, MD 20899, United States of America

Stewart Jr Michael D.

Physical Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, MD 20899, United States of America

Silver Richard M.

Physical Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, MD 20899, United States of America