Micromachines (Jul 2021)

Investigation of the Influence of Temperature and Humidity on the Bandwidth of an Accelerometer

  • Haoyu Huang,
  • Weidong Fang,
  • Chen Wang,
  • Jian Bai,
  • Kaiwei Wang,
  • Qianbo Lu

DOI
https://doi.org/10.3390/mi12080860
Journal volume & issue
Vol. 12, no. 8
p. 860

Abstract

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Bandwidth is an important parameter for accelerometers, in some cases, even surpassing sensitivity. However, there are few studies focused on the relationship between bandwidth and environmental conditions in practical application of accelerometers. In this paper, we systematically analyze the influence of environment on the bandwidth of accelerometers, obtaining the amplitude–frequency response curves versus damping ratio and properties of materials, wherein temperature and humidity were found as the two dominant factors that influence the bandwidth of accelerometers. Common temperature and humidity variations can result in bandwidth degradation of about 25% according to our theoretical analysis. The finite element method (FEM) is introduced to verify our theoretical analysis, and the accordance of the FEM simulation results and the theoretical results confirmed the validity of our analysis. Furthermore, a modification design is proposed to compensate for the influence of temperature and humidity on the bandwidth of accelerometers. By choosing materials with an appropriate Young’s modulus and coefficient of thermal expansion, the degradation of the bandwidth was substantially diminished by more than one order of magnitude, which can serve as a strong guide for the future realization of accelerometers with a steady and large bandwidth.

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