The Modeling of the Radiation Enhanced Diffusion of Boron in Silicon

• Gadiyak, G.V.,
• Kachurin, G.A.,
• Shatrov, V.I.,
• Tyshchenko, I.E.

Affiliations

Gadiyak, G.V.

Kachurin, G.A.

Shatrov, V.I.

Tyshchenko, I.E.