Sensors (May 2013)

Surface Acoustic Wave Devices for Harsh Environment Wireless Sensing

  • David W. Greve,
  • Tao-Lun Chin,
  • Peng Zheng,
  • Paul Ohodnicki,
  • John Baltrus,
  • Irving J. Oppenheim

DOI
https://doi.org/10.3390/s130606910
Journal volume & issue
Vol. 13, no. 6
pp. 6910 – 6935

Abstract

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Langasite surface acoustic wave devices can be used to implement harsh-environment wireless sensing of gas concentration and temperature. This paper reviews prior work on the development of langasite surface acoustic wave devices, followed by a report of recent progress toward the implementation of oxygen gas sensors. Resistive metal oxide films can be used as the oxygen sensing film, although development of an adherent barrier layer will be necessary with the sensing layers studied here to prevent interaction with the langasite substrate. Experimental results are presented for the performance of a langasite surface acoustic wave oxygen sensor with tin oxide sensing layer, and these experimental results are correlated with direct measurements of the sensing layer resistivity.

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