Low-temperature plasma magnetron discharge

Abstract

The article investigates a low-temperature plasma of the magnetron discharge of a device used for the synthesis of dielectric films by reactive cathode sputtering. The aim of the study is to determine the temperature characteristics of plasma particles and a sputtered substance, as well as the mechanism for the formation of a chemical bond between sputtered atoms and active gas molecules. A study of the composition and energy parameters of the plasma, as well as the chemical composition of the particles obtained by sputtering, was carried out by a spectroscopic method. The quantitative composition was determined by a mass spectrometer to determine the composition of the sputtered particles.

Keywords

• magnetron chamber
• mass spectrometry
• nitrogen plasma
• atomization
• argon plasma