5D-ToF-STIM Hyperspectral Imaging with a keV He+ Focused Ion Beam

• Andersen Dustin,
• Mousley Michael,
• Tabean Saba,
• Holeňák Radek,
• Ntemou Eleni,
• Hobler Gerhard,
• Wirtz Tom,
• Primetzhofer Daniel,
• Eswara Santhana

Affiliations

Andersen Dustin

Advanced Instrumentation for Nano-Analytics (AINA), MRT Department, Luxembourg Institute of Science and Technology (LIST)

Mousley Michael

Advanced Instrumentation for Nano-Analytics (AINA), MRT Department, Luxembourg Institute of Science and Technology (LIST)

Tabean Saba

Advanced Instrumentation for Nano-Analytics (AINA), MRT Department, Luxembourg Institute of Science and Technology (LIST)

Holeňák Radek

Department of Physics and Astronomy, Uppsala University

Ntemou Eleni

Department of Physics and Astronomy, Uppsala University

Hobler Gerhard

Institute of Solid-State Electronics, TU Wien

Wirtz Tom

Advanced Instrumentation for Nano-Analytics (AINA), MRT Department, Luxembourg Institute of Science and Technology (LIST)

Primetzhofer Daniel

Department of Physics and Astronomy, Uppsala University

Eswara Santhana

Advanced Instrumentation for Nano-Analytics (AINA), MRT Department, Luxembourg Institute of Science and Technology (LIST)