Diaphragm shape effect on the performance of foil-based capacitive pressure sensors
S. M. Khan,
R. B. Mishra,
N. Qaiser,
A. M. Hussain,
M. M. Hussain
Affiliations
S. M. Khan
mmh Labs, Electrical Engineering, Computer Electrical Mathematical Science, and Engineering Division (CEMSE), King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Saudi Arabia
R. B. Mishra
mmh Labs, Electrical Engineering, Computer Electrical Mathematical Science, and Engineering Division (CEMSE), King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Saudi Arabia
N. Qaiser
mmh Labs, Electrical Engineering, Computer Electrical Mathematical Science, and Engineering Division (CEMSE), King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Saudi Arabia
A. M. Hussain
Center for VLSI and Embedded Systems Technology (CVEST), International Institute of Information Technology (IIIT), Hyderabad, Telangana 500032, India
M. M. Hussain
mmh Labs, Electrical Engineering, Computer Electrical Mathematical Science, and Engineering Division (CEMSE), King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Saudi Arabia
We present detailed shape-based analyses to compare the performance of metal foil-based capacitive pressure sensors based on the shape of the diaphragm (top electrode). We perform a detailed analysis on the use of new material and deflection in various shaped diaphragms to act as a performance indicator for pressure-based capacitive sensors. A low-cost, recyclable, and readily available material is used to present an alternative to the expensive materials used in conventional pressure sensors. Diaphragms of five different shapes (circle, ellipse, pentagon, square, and rectangle) are fabricated and analyzed. Mathematical, FEM, and experimental tests are performed for capacitive sensors fabricated in five different shapes. The mathematically calculated deflection for each shaped diaphragm is compared with the results of the corresponding FEM simulations. Two different experiments are performed to verify the performance of pressure sensors.
