Multilayer optics for XUV spectral region: technology fabrication and applications

• Andreev S.,
• Akhsakhalyan A.,
• Bibishkin M.,
• Chkhalo N.,
• Gaponov S.,
• Gusev S.,
• Kluenkov E.,
• Prokhorov K.,
• Salashchenko N.,
• Schafers F.,
• Zuev S.

Affiliations

Andreev S.

Institute for Physics of Microstructures RAS and X-Ray company, GSP105, 603600, Nizhny Novgorod, Russia

Akhsakhalyan A.

Institute for Physics of Microstructures RAS and X-Ray company, GSP105, 603600, Nizhny Novgorod, Russia

Bibishkin M.

Institute for Physics of Microstructures RAS and X-Ray company, GSP105, 603600, Nizhny Novgorod, Russia

Chkhalo N.

Institute for Physics of Microstructures RAS and X-Ray company, GSP105, 603600, Nizhny Novgorod, Russia

Gaponov S.

Institute for Physics of Microstructures RAS and X-Ray company, GSP105, 603600, Nizhny Novgorod, Russia

Gusev S.

Institute for Physics of Microstructures RAS and X-Ray company, GSP105, 603600, Nizhny Novgorod, Russia

Kluenkov E.

Institute for Physics of Microstructures RAS and X-Ray company, GSP105, 603600, Nizhny Novgorod, Russia

Prokhorov K.

Institute for Physics of Microstructures RAS and X-Ray company, GSP105, 603600, Nizhny Novgorod, Russia

Salashchenko N.

Institute for Physics of Microstructures RAS and X-Ray company, GSP105, 603600, Nizhny Novgorod, Russia

Schafers F.

BESSY II, Albert Einstein St. 15, D-12489, Berlin, FRG

Zuev S.

Institute for Physics of Microstructures RAS and X-Ray company, GSP105, 603600, Nizhny Novgorod, Russia