Improvement of Substrates Properties by Incorporating Titanium Nanoparticles Deposited by DC Diode Sputtering Approach

Abstract

In this work, synthesis of titanium thin films on two different substrates (glass and n-type Si), with thicknesses of 90 and 145 nm at two different times (5 and 10 min) respectively, has been obtained. The thin films have been successfully deposited on glass and silicon substrates using DC diode sputtering technique. The optical properties of the prepared thin films have been checked out using the optical reflectance spectrum. A significant reduction in surface reflectivity was observed at (10 min) sputtering time. The structural properties of the prepared thin films were studied using X-ray diffraction (XRD) and field-emission scanning electron microscopy (FE-SEM). XRD results confirmed that titanium thin films had a hexagonal structure with preferred orientation on (002). The images of FESEM showed that all the samples had a uniform distribution of granular surface morphology. The grain sizes of the Ti nanostructure were estimated using Scherrers’ analysis. The thickness of Ti thin film increased as the sputtering time increased for both glass and Si n-type substrates. The repeated experiments revealed that most uniform Ti thin film is on Si substrate (n-type) with particle size 10 nm at deposition time 5 min.

Keywords

• titanium nanoparticles
• dc diode sputtering approach
• x-ray diffraction
• fesem