Area-Selective, In-Situ Growth of Pd-Modified ZnO Nanowires on MEMS Hydrogen Sensors

Abstract

Nanomaterials are widely utilized as sensing materials in semiconductor gas sensors. As sensor sizes continue to shrink, it becomes increasingly challenging to construct micro-scale sensing materials on a micro-sensor with good uniformity and stability. Therefore, in-situ growth with a desired pattern in the tiny sensing area of a microsensor is highly demanded. In this work, we combine area-selective seed layer formation and hydrothermal growth for the in-situ growth of ZnO nanowires (NWs) on Micro-electromechanical Systems (MEMS)-based micro-hotplate gas sensors. The results show that the ZnO NWs are densely grown in the sensing area. With Pd nano-particles’ modification of the ZnO NWs, the sensor is used for hydrogen (H2) detection. The sensors with Pd-ZnO NWs show good repeatability as well as a reversible and uniform response to 2.5 ppm–200 ppm H2. Our approach offers a technical route for designing various kinds of gas sensors.

Keywords

• in-situ growth
• area-selective
• MEMS
• H₂ sensor
• micro-hotplate