Flow-Through Self-Standing Porous Silicon Sensor

Abstract

A self-standing porous silicon (PS) multilayer structure detached from the substrate by the lift-off method and integrated with a microfluidic cell is presented. Experiments of refractive index changes sensing flow through open-ended pores are reported. We continuously recorded the reflectance spectra of the PS membrane each 30 s and measured the shift as different substances flowed through the structure. The experimental sensitivity values are in good agreement with the theoretical simulations performed.

Keywords

• porous silicon
• membrane
• lift-off
• flow-through
• self-standing film
• sensing