Miniature optical fiber photoacoustic spectroscopy gas sensor based on a 3D micro-printed planar-spiral spring optomechanical resonator

Abstract

Photoacoustic spectroscopy (PAS) gas sensors based on optomechanical resonators (OMRs) have garnered significant attention for ultrasensitive trace-gas detection. However, a major challenge lies in balancing small size with high performance when developing ultrasensitive miniaturized optomechanical resonant PAS (OMR-PAS) gas sensors for space-constrained applications. Here, we present a miniature optical fiber PAS gas sensor based on a planar-spiral spring OMR (PSS-OMR) that is in situ 3D micro-printed on the end-face of a fiber-optic ferrule. Experimental results demonstrate that mechanical vibrational resonance can enhance the sensor's acoustic sensitivity by over two orders of magnitude. Together with a 1.4 μL non-resonant photoacoustic cell, it can detect C2H2 gas concentration at the 45-ppb level, and its response is very fast approximating 0.2 seconds. This optical fiber OMR-PAS gas sensor holds great promise for the detection or monitoring of rapidly varying trace gas in many applications ranging from production process control to industrial environmental surveillance.

Keywords

• Optical fiber sensor
• Photoacoustic gas sensor
• Optomechanical microresonator
• Fabry-Pérot cavity
• 3D micro-printing