Accurate Local Modulation of Graphene Terahertz Metamaterials by Direct Electron Beam Irradiation
Zhuocheng Zhang,
Xiaoqiuyan Zhang,
Min Hu,
Tianyu Zhang,
Xingxing Xu,
Tao Zhao,
Yanyu Wei,
Yubin Gong,
Shenggang Liu
Affiliations
Zhuocheng Zhang
Terahertz Research Center, School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China
Xiaoqiuyan Zhang
Terahertz Research Center, School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China
Min Hu
Terahertz Research Center, School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China
Tianyu Zhang
Terahertz Research Center, School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China
Xingxing Xu
Terahertz Research Center, School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China
Tao Zhao
Terahertz Research Center, School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China
Yanyu Wei
Terahertz Research Center, School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China
Yubin Gong
Terahertz Research Center, School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China
Shenggang Liu
Terahertz Research Center, School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China
Electrical gating has been typically used for Graphene-based devices to deliver high performance with superior electrical controllability. In this study, we utilize direct electron beam irradiation to attain the electrical controllability of graphene. The newly established system combines terahertz time-domain spectroscopy (TDS) with scanning electron microscopy (SEM). We experimentally demonstrate the precise localized tuning of graphene terahertz metamaterials, as the size and position of the electron beam generated by SEM are highly controllable. Furthermore, graphene metamaterials with different chemical potentials are simulated, and the results are highly consistent with the experiments.
