Numerical Investigation of Thermal Buoyancy, the Electromagnetic Force and Forced Convection in Conventional RF Systems for 4-Inch Sic by TSSG

Abstract

In this paper, we study thermal buoyancy, the electromagnetic force and forced convection in a conventional radio frequency (RF) furnace for growing large-sized (4-inch) silicon carbide ingots using the top-seeded solution method. The thermal buoyancy and electromagnetic force are analyzed qualitatively and quantitatively under real working conditions, and a method to increase the growth stability of large-sized (4-inch) SiC is proposed through the study of forced convection.

Keywords

• computer simulation
• top-seeded solution growth
• large-sized silicon carbide
• stability