Mid-spatial frequency error generation mechanisms and prevention strategies for the grinding process

Abstract

Abstract The research presented in this paper is focused on the link between manufacturing parameters and the resulting mid-spatial frequency error in the manufacturing process of precision optics. The goal is to understand the generation mechanisms of mid-spatial frequency errors and avoid their appearance in the manufacturing process. Also, a simulation which is able to predict the resulting mid-spatial frequency error from a manufacturing process is developed and verified.

Keywords

• Mid-spatial frequency error
• MSFE
• Ripple
• Grinding
• Optic manufacturing
• Simulation