Hybrid Integration of Photonic Crystal Membrane Lasers via Postprocess Bonding

Abstract

Photonic crystal (PhC) lasers in InGaAsP membranes are bonded after fabrication to a sapphire substrate. The processed devices are held to the sapphire by van der Waals forces and do not require a high temperature anneal. PhC H2 defect cavity devices are found to lase continuous wave and line defect heterostructure devices lase pulsed, both under optical excitation. Postprocess bonding allows extensive fabrication on the native substrate before being transferred to a new substrate, which may be useful for making more complex nanophotonic devices and/or electrically injected devices.

Keywords

• Photonic crystal lasers
• integrated nanophotonic systems
• semiconductor lasers