Positioning Performance of a Sub-Arc-Second Micro-Drive Rotary System

Manzhi Yang; Zhenyang Lv; Chuanwei Zhang; Yizhi Yang; Gang Jing; Wei Guo; Zhengxiong Lu; Yumei Huang; Kaiyang Wei; Linyue Li; Bin Feng; Hongyu Ge

doi:10.3390/mi12091063

Micromachines (Aug 2021)

Positioning Performance of a Sub-Arc-Second Micro-Drive Rotary System

Manzhi Yang,
Zhenyang Lv,
Chuanwei Zhang,
Yizhi Yang,
Gang Jing,
Wei Guo,
Zhengxiong Lu,
Yumei Huang,
Kaiyang Wei,
Linyue Li,
Bin Feng,
Hongyu Ge

Affiliations

Manzhi Yang: College of Mechanical Engineering, Xi’an University of Science and Technology, Xi’an 710054, China
Zhenyang Lv: College of Mechanical Engineering, Xi’an University of Science and Technology, Xi’an 710054, China
Chuanwei Zhang: College of Mechanical Engineering, Xi’an University of Science and Technology, Xi’an 710054, China
Yizhi Yang: College of Humanities and Foreign Languages, Xi’an University of Science and Technology, Xi’an 710054, China
Gang Jing: College of Mechanical Engineering, Xi’an University of Science and Technology, Xi’an 710054, China
Wei Guo: College of Mechanical Engineering, Xi’an University of Science and Technology, Xi’an 710054, China
Zhengxiong Lu: College of Mechanical Engineering, Xi’an University of Science and Technology, Xi’an 710054, China
Yumei Huang: School of Mechanical and Precision Instrumental Engineering, Xi’an University of Technology, Xi’an 710048, China
Kaiyang Wei: College of Mechanical Engineering, Xi’an University of Science and Technology, Xi’an 710054, China
Linyue Li: College of Mechanical Engineering, Xi’an University of Science and Technology, Xi’an 710054, China
Bin Feng: College of Mechanical Engineering, Xi’an University of Science and Technology, Xi’an 710054, China
Hongyu Ge: College of Mechanical Engineering, Xi’an University of Science and Technology, Xi’an 710054, China

DOI: https://doi.org/10.3390/mi12091063
Journal volume & issue: Vol. 12, no. 9
p. 1063

Abstract

Read online

In the macro/micro dual-drive rotary system, the micro-drive system compensates for the position error of the macro-drive system. To realize the sub-arc-second (i.e., level of 1″–0.1″) positioning of the macro/micro dual-drive rotary system, it is necessary to study the positioning performance of the sub-arc-second micro-drive rotary system. In this paper, we designed a sub-arc-second micro-drive rotary system consisting of a PZT (piezoelectric actuator) and a micro rotary mechanism, and used simulation and experimental methods to study the positioning performance of the system. First, the micro-drive rotary system was developed to provide ultra-precise rotary motion. In this system, the PZT has ultrahigh resolution at a level of 0.1 nanometers in linear motion; a micro rotating mechanism was designed according to the composite motion principle of the flexible hinge, which could transform the linear motion of piezoelectric ceramics into rotating motion accurately. Second, the drive performance was analyzed based on the drive performance experiment. Third, kinematics, simulation, and experiments were carried out to analyze the transformation performance of the system. Finally, the positioning performance equation of the system was established based on the two performance equations, and the maximum rotary displacements and positioning error of the system were calculated. The study results showed that the system can provide precision motion at the sub-arc-second and good linearity of motion. This study has a certain reference value in ultra-precision positioning and micromachining for research on rotary motion systems at the sub-arc-second level.

Published in Micromachines

ISSN: 2072-666X (Online)
Publisher: MDPI AG
Country of publisher: Switzerland
LCC subjects: Technology: Mechanical engineering and machinery
Website: https://www.mdpi.com/journal/micromachines

About the journal

Abstract

Keywords