Effects of temperature and target power on the sputter-deposition of (Ti,Zr)n+1AlCn MAX-phase thin films

Clio Azina; Per Eklund

Results in Materials (Mar 2021)

Effects of temperature and target power on the sputter-deposition of (Ti,Zr)n+1AlCn MAX-phase thin films

Clio Azina,
Per Eklund

Affiliations

Clio Azina: Corresponding author.; Thin Film Physics Division, Department of Physics, Chemistry and Biology (IFM), Linköping University, Linköping, SE-58183, Sweden
Per Eklund: Thin Film Physics Division, Department of Physics, Chemistry and Biology (IFM), Linköping University, Linköping, SE-58183, Sweden

Journal volume & issue: Vol. 9
p. 100159

Abstract

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Solid solution MAX phases in the Ti–Zr–Al–C system are investigated by sputter-deposition from elemental (Al, C) and alloy (Ti:Zr 50:50) targets. The effect of substrate temperature in the range 850 °C–1000 °C and different Al target-power are discussed. Lower-temperature conditions yielded films mainly composed of carbide and aluminide phases, (Ti,Zr)C and Al3Zr(Ti), while temperatures ≥ 950 °C resulted in (Ti,Zr)2AlC MAX-phase-containing films.

Published in Results in Materials

ISSN: 2590-048X (Online)
Publisher: Elsevier
Country of publisher: Netherlands
LCC subjects: Technology: Electrical engineering. Electronics. Nuclear engineering: Materials of engineering and construction. Mechanics of materials
Website: https://www.journals.elsevier.com/results-in-materials

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