Investigation of Structural Stability for Monolithic Nano Bridges on Micro Apertures

Abstract

The instability of polymeric membranes with nano- and micro-sized apertures has been regarded as one of the main reasons behind realizing ultra-thin membranes with apertures. As is well known, when the thickness of the membrane gets thinner or the aperture size gets smaller, the possibility of geometrical deformation or structural damage by collapse or fracture increases. Herein, we suggest the design rules for the stability of polymeric membranes possessing 1D nano-line patterns monolithically constructed on micro-aperture supporting layers. The proposed theoretical model, which has been thoroughly demonstrated and analyzed based on both theoretical and experimental approaches, provides stability criteria for lateral collapse and vertical fracture of ultra-thin membranes with apertures.

Keywords

• multiscale structure
• structural stability
• UV curable polymer
• PDMS
• two-level apertures