Express in-situ measurement of single crystal diamond growth/etching rate in microwave plasma: how to perform multiparametric kinetics study in one working day

• Ralchenko V.G.,
• Yurov V.Yu.,
• Bushuev E.V.,
• Bolshakov A.P.,
• Ashkinazi E.E.,
• Antonova I.A.,
• Zavedeev E.V.,
• Khomich A.A.,
• Konov V.I.

Affiliations

Ralchenko V.G.

Yurov V.Yu.

Bushuev E.V.

General Physics Institute RAS

Bolshakov A.P.

Ashkinazi E.E.

Antonova I.A.

Zavedeev E.V.

General Physics Institute RAS

Khomich A.A.

Konov V.I.