Proceedings
(Dec 2018)
Ultra-Thin Sensor Systems Integrating Silicon Chips with On-Foil Passive and Active Components
Mourad Elsobky,
Golzar Alavi,
Björn Albrecht,
Thomas Deuble,
Christine Harendt,
Harald Richter,
Zili Yu,
Joachim N. Burghartz
Affiliations
Mourad Elsobky
Institut für Mikroelektronik Stuttgart (IMS CHIPS), 70569 Stuttgart, Germany
Golzar Alavi
Institut für Nano- und Mikroelektronische Systeme (INES), 70569 Stuttgart, Germany
Björn Albrecht
Institut für Mikroelektronik Stuttgart (IMS CHIPS), 70569 Stuttgart, Germany
Thomas Deuble
Institut für Mikroelektronik Stuttgart (IMS CHIPS), 70569 Stuttgart, Germany
Christine Harendt
Institut für Mikroelektronik Stuttgart (IMS CHIPS), 70569 Stuttgart, Germany
Harald Richter
Institut für Mikroelektronik Stuttgart (IMS CHIPS), 70569 Stuttgart, Germany
Zili Yu
Institut für Mikroelektronik Stuttgart (IMS CHIPS), 70569 Stuttgart, Germany
Joachim N. Burghartz
Institut für Mikroelektronik Stuttgart (IMS CHIPS), 70569 Stuttgart, Germany
DOI
https://doi.org/10.3390/proceedings2130748
Journal volume & issue
Vol. 2,
no. 13
p.
748
Abstract
Read online
Hybrid System-in-Foil exploits the complementary benefits of integrating embedded silicon chips with on-foil passive and active electronic components. In this work, the design, fabrication and characterization of three on-foil components, namely a humidity sensor, near field communication antenna and organic thin-film transistors, are investigated.
Keywords
WeChat QR code
Close