Proceedings
(Nov 2018)
On-Chip Temperature Compensation for Thermal Impedance Sensors
Martin Jaegle,
Hans-Fridtjof Pernau,
Marcus Pfützner,
Mike Benkendorf,
Xinke Li,
Markus Bartel,
Susanne Drost,
Jürgen Wöllenstein
Affiliations
Martin Jaegle
Fraunhofer Institute for Physical Measurement Techniques IPM, 79110 Freiburg, Germany
Hans-Fridtjof Pernau
Fraunhofer Institute for Physical Measurement Techniques IPM, 79110 Freiburg, Germany
Marcus Pfützner
Fraunhofer Institute for Physical Measurement Techniques IPM, 79110 Freiburg, Germany
Mike Benkendorf
Fraunhofer Institute for Physical Measurement Techniques IPM, 79110 Freiburg, Germany
Xinke Li
Fraunhofer Institute for Physical Measurement Techniques IPM, 79110 Freiburg, Germany
Markus Bartel
Fraunhofer Institute for Physical Measurement Techniques IPM, 79110 Freiburg, Germany
Susanne Drost
Fraunhofer Institute for Physical Measurement Techniques IPM, 79110 Freiburg, Germany
Jürgen Wöllenstein
Fraunhofer Institute for Physical Measurement Techniques IPM, 79110 Freiburg, Germany
DOI
https://doi.org/10.3390/proceedings2131053
Journal volume & issue
Vol. 2,
no. 13
Abstract
Read online
Electrical impedance spectroscopy is a widespread characterization method for solids or fluids in industrial applications. We here report on its thermal equivalent, the “thermal impedance spectroscopy”, improved by using a temperature compensation method for temperature dependent thermal measurements using an on-chip reference resistor.
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