Enhanced sputtering of Ge nanowires under synergetic effect of Mn ion and electron beams

Abstract

To monitor the damage evolution in Ge nanowires during Mn implantation, in situ transmission electron microscopy observations were carried-out as a function of the Mn fluence. Special interest lies in the sputtering of nanowires. We evidence an enhanced sputtering under the synergetic effects of Mn implantation and electron beam which may alert experimenters to some possible artefacts related to in situ observations in the case of nanostructures.