Atomic Nature of the Growth Mechanism of Atomic Layer Deposited High‑κ Y2O3 on GaAs(001)‑4 × 6 Based on in Situ Synchrotron Radiation Photoelectron Spectroscopy

• Chiu-Ping Cheng,
• Wan-Sin Chen,
• Yi-Ting Cheng,
• Hsien-Wen Wan,
• Cheng-Yeh Yang,
• Tun-Wen Pi,
• Jueinai Kwo,
• Minghwei Hong

Affiliations

Chiu-Ping Cheng

Department of Electrophysics, National Chiayi University, Chiayi, Taiwan, ROC

Wan-Sin Chen

Graduate Institute of Applied Physics and Department of Physics, National Taiwan University, Taipei, Taiwan, ROC

Yi-Ting Cheng

Graduate Institute of Applied Physics and Department of Physics, National Taiwan University, Taipei, Taiwan, ROC

Hsien-Wen Wan

Graduate Institute of Applied Physics and Department of Physics, National Taiwan University, Taipei, Taiwan, ROC

Cheng-Yeh Yang

Department of Physics, National Tsing Hua University, Hsinchu, Taiwan, ROC

Tun-Wen Pi

National Synchrotron Radiation Research Center, Hsinchu, Taiwan, ROC

Jueinai Kwo

Department of Physics, National Tsing Hua University, Hsinchu, Taiwan, ROC

Minghwei Hong

Graduate Institute of Applied Physics and Department of Physics, National Taiwan University, Taipei, Taiwan, ROC